The ion source IQE 12/38 is an extractor type, differentially pumped ion source producing a focused, scannable ion beam of high current density. 

The IQE 12/38 operates with a filament and ionizes the gas by electron bombardment. Its long-lifetime special Yttrium oxide coated Iridium filament makes the source suitable for reactive and inert gases. In sensitive environments, differential pumping ensures low pressure during opration of the source.

The two lens system of the source allows easy changing of the spot size, which is continuously variable from 160 µm to 1000 µm. The PU-IQE12/38 power supply can be remotely controlled and provides key stone correction of the scan area to generate flat crater bottoms on tilted samples.