AJA SPUTTERING SYSTEMS
AJA offers magnetron sputtering systems for research scale physical vapor deposition ranging from compact (ATC Orion Series) to complex (ATC Flagship Series) plus small batch coaters (ATC-B Series). These sputtering systems can be configured in either con-focal, normal incidence, off-axis, glancing angle, or combination of target to substrate orientations. Substrate holder features include radiant heating (1000°C), azimuthal rotation, RF/DC biasing, z-motion, cooling (H
2O or LN
2), tilting, or planetary motion.
ATC ORION SERIES SPUTTERING SYSTEMS
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Compact Systems
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Price range: $50,000 - $300,000
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10", 12" and 14" chamber Ø
- HV and UHV versions
- 1.5", 2" and 3" sputter sources
- Substrate holders to 6" Ø
- Load lock
- Substrate cassettes
- Auto-loading
- Computer control
- Custom engineered versions
- Much more than a tabletop system
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ATC FLAGSHIP SERIES SPUTTERING SYSTEMS
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Flagship Systems
- Price Range: $100,000 - $950,000+
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18" to 34" chamber Ø
- HV and UHV versions
- 1" to 8" diameter sputter sources
- In-situ tilt source option
- Substrate holders to 8" Ø
- Load locks
- Substrate cassettes and masking
- Auto-loading
- Computer control
- Custom engineered versions
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ATC-B SERIES BATCH COATING SYSTEMS
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Batch Coating Systems
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Price range: $140,000 - $650,000+
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Cylindrical or box style chambers
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Load-lock & cassette options
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Circular, triangular or linear sources
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Integrated hoist or hinged door
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Single, multi-layer or co-deposition
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Configured for your application
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